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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Fabrication of single crystal silicon resonators with narrow gaps
Kiihamaki, J., Kaajakari, V., Luoto, H., Kattelus, H., Yli-Koski, M.Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1497332
File:
PDF, 613 KB
english, 2005