SILICON WAVEGUIDE SIDEWALL SMOOTHING BY RESIST REFLOWING

Journal of Nonlinear Optical Physics & Materials 2010 / 12 Vol. 19; Iss. 4

SILICON WAVEGUIDE SIDEWALL SMOOTHING BY RESIST REFLOWING

CAI, JINGNAN, LIM, PENG HUEI, ISHIKAWA, YASUHIKO, WADA, KAZUMI
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Volume:
19
Language:
english
Journal:
Journal of Nonlinear Optical Physics & Materials
DOI:
10.1142/s0218863510005741
Date:
December, 2010
File:
PDF, 941 KB
english, 2010
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