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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Thermal conductivity measurements of ultra-thin single crystal silicon films using improved structure
Hao, Zhang, Zhichao, Lv, Lilin, Tian, Zhimin, Tan, Litian, Liu, Zhijian, LiYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306679
File:
PDF, 182 KB
english, 2006