[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Improved understanding of electron density and temperature in a low pressure VHF-CCP from kinetic simulation
Stoltz, Peter H., Fiebrandt, Marcel, Stapelmann, Katharina, Awakowicz, PeterYear:
2013
DOI:
10.1109/plasma.2013.6633234
File:
PDF, 89 KB
2013