[IEEE 2013 IEEE 40th International Conference on Plasma...

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[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Improved understanding of electron density and temperature in a low pressure VHF-CCP from kinetic simulation

Stoltz, Peter H., Fiebrandt, Marcel, Stapelmann, Katharina, Awakowicz, Peter
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Year:
2013
DOI:
10.1109/plasma.2013.6633234
File:
PDF, 89 KB
2013
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