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[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Simulation of Atmospheric Pressure Methane-Hydrogen Microdischarge for Diamond Like Carbon (DLC) Film Deposition
Farouk, Tanvir, Farouk, Bakhtier, Gutsol, Alexander, Fridman, AlexanderYear:
2007
Language:
english
DOI:
10.1109/ppps.2007.4345814
File:
PDF, 55 KB
english, 2007