![](/img/cover-not-exists.png)
Glass Blowing on a Wafer Level
Eklund, E. Jesper, Shkel, Andrei M.Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.892887
Date:
April, 2007
File:
PDF, 1.28 MB
english, 2007