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Device Photolithography: Reduction Cameras: Mechanical Design of the 3.5X and 1.4X Reduction Cameras
Poulsen, M. E., Stafford, J. W.Volume:
49
Language:
english
Journal:
Bell System Technical Journal
DOI:
10.1002/j.1538-7305.1970.tb02518.x
Date:
November, 1970
File:
PDF, 3.34 MB
english, 1970