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[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (1997.05.19-1997.05.22)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Electron temperature axial pattern in the RF discharge
Lisovskiy, V.A., Boichuk, V.S., Yegorenkov, V.D.Year:
1997
Language:
english
DOI:
10.1109/plasma.1997.605269
File:
PDF, 72 KB
english, 1997