[IEEE 2012 IEEE 12th International Conference on Nanotechnology (IEEE-NANO) - Birmingham, United Kingdom (2012.08.20-2012.08.23)] 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) - Fabrication and metrology of electromagnetically actuated microcantilever arrays for biochemical sensing
Gotszalk, Teodor, Nieradka, Konrad, Kopiec, Daniel, Maloziec, Grzegorz, Janus, Pawel, Sierakowski, Andrzej, Grabiec, PiotrYear:
2012
Language:
english
DOI:
10.1109/nano.2012.6322229
File:
PDF, 632 KB
english, 2012