Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy
Kregar, Z., Krstulovic, N., Milosevic, S., Kenda, K., Cvelbar, U., Mozetic, M.Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.920896
Date:
August, 2008
File:
PDF, 249 KB
english, 2008