[IEEE 2012 24th International Conference on Microelectronics (ICM) - Algiers, Algeria (2012.12.16-2012.12.20)] 2012 24th International Conference on Microelectronics (ICM) - Simulation of ion implantation for CMOS 1µm using SILVACO tools
Boubaaya, Mohamed, Hadj Larbi, Faycal, Oussalah, SlimaneYear:
2012
Language:
english
DOI:
10.1109/icm.2012.6471381
File:
PDF, 309 KB
english, 2012