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[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Plasma induced charging damage on thin gate oxide
Soodoo Chae,, Kyoungjin Yoo,, Byoungho Park,, Sukbin Han,, Jaehee Ha,, Jinwon Park,Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820983
File:
PDF, 315 KB
english, 1999