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[IEEE IEEE Sensors 2003 - Toronto, Ont., Canada (22-24 Oct. 2003)] Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) - Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor
Zunxian Yang,, Xinxin Li,, Yuelin Wang,, Min Liu,, Haifei Bao,, Baoluo Cheng,Year:
2003
Language:
english
DOI:
10.1109/icsens.2003.1279059
File:
PDF, 272 KB
english, 2003