Surface oxidation of GaN(0001): Nitrogen plasma-assisted...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2014 / 09 Vol. 32; Iss. 5

Surface oxidation of GaN(0001): Nitrogen plasma-assisted cleaning for ultrahigh vacuum applications

Gangopadhyay, Subhashis, Schmidt, Thomas, Kruse, Carsten, Figge, Stephan, Hommel, Detlef, Falta, Jens
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4886956
Date:
September, 2014
File:
PDF, 1.76 MB
english, 2014
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