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[IEEE 2004 IEEE Workshop on Microelectronics and Electron Devices - Boise, ID, USA (16 April 2004)] 2004 IEEE Workshop on Microelectronics and Electron Devices - Process development of electron beam lithography in an academic environment

Gatlin, G.S., Eskridge, C.W., Brinkerhoff, J.M., Fife, J.D., Jessing, J.R.
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Year:
2004
Language:
english
DOI:
10.1109/wmed.2004.1297370
File:
PDF, 1.64 MB
english, 2004
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