[IEEE 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society - Lyon, France (2007.08.22-2007.08.26)] 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society - Measurement of Defects in Spin Coated Polyimide Films
Rubehn, Birthe, Stieglitz, ThomasYear:
2007
Language:
english
DOI:
10.1109/iembs.2007.4352253
File:
PDF, 392 KB
english, 2007