[IEEE 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Los Angeles, CA, USA (9-12 Sept. 1997)] 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Hierarchical modeling and control for re-entrant semiconductor fabrication lines: a mini-fab benchmark

The file will be sent to your email address. It may take up to 1-5 minutes before you receive it.

The file will be sent to you via the Telegram messenger. It may take up to 1-5 minutes before you receive it.

Note: Make sure you have linked your account to Z-Library Telegram bot.

The file will be sent to your Kindle account. It may take up to 1–5 minutes before you receive it.

Please note: you need to verify every book you want to send to your Kindle. Check your mailbox for the verification email from Amazon Kindle.