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Identification of important growth parameters for the development of high quality Al[sub x>0.5]Ga[sub 1−x]N grown by metal organic chemical vapor deposition
Grandusky, J. R., Jamil, M., Jindal, V., Tripathi, N., Shahedipour-Sandvik, F.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2713409
File:
PDF, 1.19 MB
english, 2007