Testing of “Venetian-Blind” Silicon Microstructures With...

Journal of Microelectromechanical Systems 2006 / 06 Vol. 15; Iss. 3

Testing of “Venetian-Blind” Silicon Microstructures With Optical Methods

Merlo, S., Annovazzi-Lodi, V., Benedetti, M., Carli, F., Norgia, M.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.876664
Date:
June, 2006
File:
PDF, 2.16 MB
english, 2006
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