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[IEEE 2006 International Workshop on Nano CMOS (IWNC) - Mishima, Japan (2006.01.30-2006.02.1)] 2006 International Workshop on Nano CMOS - Evaluation of phosphorus diffusion in the confined nano-wire under the influence of Si/SiO2 interface
Aya Seike,, Itsutaku Sano,, Keisaku Yamada,, Iwao Ohdomari,Year:
2006
Language:
english
DOI:
10.1109/iwnc.2006.4570985
File:
PDF, 594 KB
english, 2006