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Identification of a deposition rate profile subspace corresponding to spatially-uniform films in planetary CVD reactors: a new criterion for uniformity control
Raymond A. AdomaitisVolume:
29
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.compchemeng.2004.09.020
File:
PDF, 692 KB
english, 2005