[IEEE 2010 IEEE Region 10 Conference (TENCON 2010) - Fukuoka (2010.11.21-2010.11.24)] TENCON 2010 - 2010 IEEE Region 10 Conference - Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas
Ide, Tomo, Nishio, Koji, Takahashi, KazuoYear:
2010
Language:
english
DOI:
10.1109/tencon.2010.5685966
File:
PDF, 832 KB
english, 2010