[IEEE Technical Digest MEMS 2001 14th IEEE International...

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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor

Li-Anne Liew,, Ruiling Luo,, Yiping Liu,, Wenge Zhang,, Linan An,, Bright, V.M., Dunn, M.L., Daily, J.W., Raj, R.
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Year:
2001
Language:
english
DOI:
10.1109/memsys.2001.906485
File:
PDF, 548 KB
english, 2001
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