[IEEE 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Wuhan (2009.12.17-2009.12.20)] 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Study on a piezoelectric structure based active vibration isolation system for high precision equipment
Xin Luo,, Hua-yan Pu,, Xue-dong Chen,, Yuan-tai Hu,, Zhen-hua Zhou,, Xiu-lan Bao,Year:
2009
Language:
english
DOI:
10.1109/spawda.2009.5428905
File:
PDF, 285 KB
english, 2009