Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
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Rapid thermal imprinting of high-aspect-ratio nanostructures with dynamic heating of mold surface
Nagato, Keisuke, Hattori, Shuntaro, Hamaguchi, Tetsuya, Nakao, MasayukiVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3517608
File:
PDF, 708 KB
english, 2010