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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Thermally stable micro hot wire sensor with borofloat glass membrane
Kap-Duk Song,, Jung-Il Bang,, Sang-Rok Lee,, Yang-Rye Lim,, Sang-Mun Lee,, Byung-Su Joo,, Yun-Su Lee,, Oyabu, T., Duk-Dong Lee,Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1497469
File:
PDF, 606 KB
english, 2005