X-ray lathe: An X-ray lithographic exposure tool for nonplanar objects
Feinerman, A.D., Lajos, R.E., White, V., Denton, D.D.Volume:
5
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.546405
Date:
January, 1996
File:
PDF, 1.33 MB
english, 1996