Comparative study of defect evolution in carbon implanted...

Physica status solidi 2015 / 01 Vol. 12; Iss. 1-2

Comparative study of defect evolution in carbon implanted strained SiGe and SiSn layers

Gaiduk, Peter I., Lundsgaard Hansen, John, Nylandsted Larsen, Arne, Skorupa, Wolfgang
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201400135
Date:
January, 2015
File:
PDF, 390 KB
english, 2015
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