[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Evaluation of low dielectric constant materials for on-chip interconnects-an industry/university research collaboration
Jihperng Leu,, Holland, S., Monnig, K.A., Ho, P.S.Year:
1995
Language:
english
DOI:
10.1109/ugim.1995.514130
File:
PDF, 451 KB
english, 1995