Liquid Phase Chemical-Enhanced Oxidation for GaAs Operated...

Japanese Journal of Applied Physics 1998 / 1 Vol. 37; Iss. Part 2, No

Liquid Phase Chemical-Enhanced Oxidation for GaAs Operated Near Room Temperature

Wang, Hwei-Heng, Huang, Chien-Jung, Wang, Yeong-Her, Houng, Mau-Phon
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.l67
Date:
January, 1998
File:
PDF, 174 KB
english, 1998
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