![](/img/cover-not-exists.png)
[IEEE 2008 Asia and South Pacific Design Automation Conference (ASPDAC) - Seoul, South Korea (2008.03.21-2008.03.24)] 2008 Asia and South Pacific Design Automation Conference - Investigation of diffusion rounding for post-lithography analysis
Gupta, Puneet, Kahng, Andrew B., Youngmin Kim,, Saumil Shah,, Sylvester, DennisYear:
2008
Language:
english
DOI:
10.1109/aspdac.2008.4483998
File:
PDF, 640 KB
english, 2008