Measurements of desorbed products by plasma beam...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 6

Measurements of desorbed products by plasma beam irradiation on SiO[sub 2]

Kurihara, Kazuaki, Yamaoka, Yoshikazu, Karahashi, Kazuhiro, Sekine, Makoto
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1795830
File:
PDF, 353 KB
english, 2004
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