Elastic properties measurement of glass layers fabricated...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1995 / 05 Vol. 42; Iss. 3

Elastic properties measurement of glass layers fabricated on silicon wafers for microelectronics and micromachines

Tsukahara, Y., Ohira, K., Yanaka, M., Inaba, M., Satoh, A.
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Volume:
42
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.384447
Date:
May, 1995
File:
PDF, 269 KB
english, 1995
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