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Studies on passivation behavior of tungsten in application to chemical mechanical polishing
Tamboli, D., Seal, S., Desai, V., Maury, A.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581790
File:
PDF, 396 KB
english, 1999