Self-Contained Frequency Trimming of Micromachined Silicon...

Journal of Microelectromechanical Systems 2013 / 10 Vol. 22; Iss. 5

Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation

Hajjam, Arash, Pourkamali, Siavash
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2263218
Date:
October, 2013
File:
PDF, 8.74 MB
english, 2013
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