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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Real time measurement of transients and electrode edge effects for plasma charging induced damage
Shawming Ma,, McVittie, J.P.Year:
1994
Language:
english
DOI:
10.1109/iedm.1994.383368
File:
PDF, 424 KB
english, 1994