[Japan Soc. Appl. Phys 1995 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (6-8 June 1995)] 1995 Symposium on VLSI Technology. Digest of Technical Papers - Application of force fill Al-plug technology to 64 Mb DRAM and 0.35 μm logic
Mizobuchi, K., Hamamoto, K., Utsugi, M., Dixit, G.A., Poarch, S., Havemann, R.H., Dobson, C.D., Jeffryes, A.I., Holverson, P.J., Rich, P., Butler, D.C., Rimmer, N., McGeown, A.Year:
1995
Language:
english
DOI:
10.1109/vlsit.1995.520852
File:
PDF, 227 KB
english, 1995