Atomic Layer Deposition of TiO2 ultrathin films on 3D...

MRS Proceedings 2012 / 1 Vol. 1439

Atomic Layer Deposition of TiO2 ultrathin films on 3D substrates for energy applications

Soum-Glaude, Audrey, Tian, Liang, Blanquet, Elisabeth, Brizé, Virginie, Cagnon, Laurent, Giusti, Gaël, Salhi, Rached, Daniele, Stéphane, Ternon, Céline, Bellet, Daniel
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Volume:
1439
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.913
Date:
January, 2012
File:
PDF, 243 KB
english, 2012
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