Aluminum nitride on titanium for CMOS compatible...

Journal of Micromechanics and Microengineering 2010 / 02 Vol. 20; Iss. 2

Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

Doll, Joseph C, Petzold, Bryan C, Ninan, Biju, Mullapudi, Ravi, Pruitt, Beth L
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/2/025008
Date:
February, 2010
File:
PDF, 1.35 MB
english, 2010
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