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[IEEE 2012 2nd Workshop on Design, Control and Software Implementation for Distributed MEMS (dMEMS) - Besancon, France (2012.04.2-2012.04.3)] 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS - Contact-Less Thin Substrate Transport Using Viscous Traction
Ostayen, Ron A.J. van, Eijk, Jan van, Schmidt, Rob H. MunnigYear:
2012
Language:
english
DOI:
10.1109/dmems.2012.19
File:
PDF, 2.08 MB
english, 2012