Surface morphology of ion-beam deposited carbon films under...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 6

Surface morphology of ion-beam deposited carbon films under high temperature

Liao, Meiyong, Chai, Chunlin, Yang, Shaoyan, Liu, Zhikai, Qin, Fuguang, Wang, Zhanguo
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1517996
File:
PDF, 468 KB
english, 2002
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