Fabrication of SONOS-Type Flash Memory with the Binary...

Journal of The Electrochemical Society 2007 Vol. 154; Iss. 4

Fabrication of SONOS-Type Flash Memory with the Binary High-k Dielectrics by the Sol-Gel Spin Coating Method

Ko, Fu-Hsiang, You, Hsin-Chiang, Chang, Chun-Ming, Yang, Wen-Luh, Lei, Tan-Fu
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Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2433705
File:
PDF, 237 KB
english, 2007
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