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Anomalous diffusion of boron in silicon driven under the N/sub 2/O ambient
Don-Gey Liu,, Wen Luh Yang,, Jiang-Shihn Tsang,, Kuo Wei Chu,, Miin-Shyue Shiau,, Yu Ming Hung,Volume:
21
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.887469
Date:
December, 2000
File:
PDF, 41 KB
english, 2000