[IEEE IEEE International Electron Devices Meeting 2003 -...

  • Main
  • [IEEE IEEE International Electron...

[IEEE IEEE International Electron Devices Meeting 2003 - Washington, DC, USA (8-10 Dec. 2003)] IEEE International Electron Devices Meeting 2003 - A new isolation method for single crystal silicon MEMS and its application to z-axis microgyroscope

Sangjun Park,, Jongpal Kim,, Donghun Kwak,, Hyoungho Ko,, Carr, W., Buss, J., Dong-il Cho,
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2003
Language:
english
DOI:
10.1109/iedm.2003.1269440
File:
PDF, 233 KB
english, 2003
Conversion to is in progress
Conversion to is failed