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[IEEE IEEE International Electron Devices Meeting 2003 - Washington, DC, USA (8-10 Dec. 2003)] IEEE International Electron Devices Meeting 2003 - A new isolation method for single crystal silicon MEMS and its application to z-axis microgyroscope
Sangjun Park,, Jongpal Kim,, Donghun Kwak,, Hyoungho Ko,, Carr, W., Buss, J., Dong-il Cho,Year:
2003
Language:
english
DOI:
10.1109/iedm.2003.1269440
File:
PDF, 233 KB
english, 2003