![](/img/cover-not-exists.png)
[IEEE 1999 57th Annual Device Research Conference Digest - Santa Barbara, CA, USA (28-30 June 1999)] 1999 57th Annual Device Research Conference Digest (Cat. No.99TH8393) - Applying selective liquid-phase deposition instead of reactive ion etching to the contact hole formation of MOSFETs
Ching-Fa Yeh,, Chien-Hung Liu,, Shor-Chen Wang,, Yu-Jei Hsiao,Year:
1999
Language:
english
DOI:
10.1109/drc.1999.806336
File:
PDF, 201 KB
english, 1999