Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors
Sansonnens, L., Strahm, B., Derendinger, L., Howling, A. A., Hollenstein, Ch., Ellert, Ch., Schmitt, J. P. M.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1868572
File:
PDF, 593 KB
english, 2005