Nanopatterning with interferometric lithography using a...

IEEE Transactions on Nanotechnology 2006 / 01 Vol. 5; Iss. 1

Nanopatterning with interferometric lithography using a compact /spl lambda/=46.9-nm laser

Capeluto, M.G., Vaschenko, G., Grisham, M., Marconi, M.C., Luduena, S., Pietrasanta, L., Yunfeng Lu,, Parkinson, B., Menoni, C.S., Rocca, J.J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5
Language:
english
Journal:
IEEE Transactions On Nanotechnology
DOI:
10.1109/tnano.2005.858599
Date:
January, 2006
File:
PDF, 1.41 MB
english, 2006
Conversion to is in progress
Conversion to is failed