Modeling and diagnostics of silicon nitride deposition from 254-nm Hg photosensitization of SiH4-NH3 mixtures: Luminescence of HgNH3 excimer and laser-induced fluorescence of NH2(Ã 2A1)
Fuyuki, Takashi, Allain, Bruno, Perrin, Jéro^meVolume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346385
File:
PDF, 1.99 MB
english, 1990