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Charge trapping and charge compensation during Auger electron spectroscopy on SiO[sub 2]
Guo, Hansheng, Maus-Friedrichs, W., Kempter, V.Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371051
File:
PDF, 315 KB
english, 1999