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[IEEE 2010 24th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) - Braunschweig, Germany (2010.08.30-2010.09.3)] 24th ISDEIV 2010 - Influence of nitrogen pressure on silicon content in Ti-Si-N coatings deposited by the vacuum-arc method
Aksenov, I.I., Belous, V.A., Zadneprovskiy, Yu.A., Kuprin, A.S., Lomino, N.S., Ovcharenko, V.D., Sobol, O.V.Year:
2010
Language:
english
DOI:
10.1109/deiv.2010.5625887
File:
PDF, 1.31 MB
english, 2010